Abstract: A control circuit for a resistive heater includes a rectifier configured to receive an AC signal from an AC source. A switch is connected to the rectifier. A first diode is connected to the switch and the rectifier. An LC circuit is connected to the switch, the first diode and a resistive heater. A thermocouple is configured to generate a temperature signal based on a temperature of the resistive heater. A switch controller is configured to receive the temperature signal from the thermocouple and generate a switch control signal configured to control a duty cycle of the switch to vary power output to the LC circuit. The LC circuit outputs a rectified AC signal having an amplitude that varies based on a duty cycle of the switch.

Abstract: A processing chamber includes: a lower portion; an upper portion that covers the lower portion; a pedestal that is located within the lower portion, to vertically support a substrate above a top surface of the pedestal to distribute a precursor between the top surface and a first surface of the substrate, the pedestal configured to be electrically connected to one of a ground potential and a radio frequency potential; a grid that is coupled to the upper portion and that is configured to be electrically connected to the other one of the ground potential and the radio frequency potential; a window that covers an opening in the upper portion; and an infrared light source configured to transmit infrared light through the window and the grid to a second surface of the substrate. The second surface of the substrate is opposite the first surface of the substrate.