Patents by Inventor Randal Dean SCHMIEDING

Randal Dean SCHMIEDING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM GAS DISTRIBUTION FOR A PVD PROCESS
    Publication number: 20230187191
    Abstract: Embodiments of process shield for use in process chambers are provided herein. In some embodiments, a process shield for use in a process chamber includes: an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the upper portion includes a plurality of annular trenches on an upper surface thereof and having a plurality of slots disposed therebetween to fluidly couple the plurality of annular trenches, wherein one or more inlets extend from an outer surface of the annular body to an outermost trench of the plurality of annular trenches.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 15, 2023
    Inventors: Kirankumar Neelasandra SAVANDAIAH, Shane LAVAN, Sundarapandian Ramalinga Vijayalakshmi REDDY, Randal Dean SCHMIEDING, Yong CAO
  • Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
    Patent number: 11600477
    Abstract: Embodiments of process shield for use in process chambers are provided herein. In some embodiments, a process shield for use in a process chamber includes: an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the upper portion includes a plurality of annular trenches on an upper surface thereof and having a plurality of slots disposed therebetween to fluidly couple the plurality of annular trenches, wherein one or more inlets extend from an outer surface of the annular body to an outermost trench of the plurality of annular trenches.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: March 7, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kirankumar Neelasandra Savandaiah, Shane Lavan, Sundarapandian Ramalinga Vijayalakshmi Reddy, Randal Dean Schmieding, Yong Cao
  • GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM GAS DISTRIBUTION FOR A PVD PROCESS
    Publication number: 20220186361
    Abstract: Embodiments of process shield for use in process chambers are provided herein. In some embodiments, a process shield for use in a process chamber includes: an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the upper portion includes a plurality of annular trenches on an upper surface thereof and having a plurality of slots disposed therebetween to fluidly couple the plurality of annular trenches, wherein one or more inlets extend from an outer surface of the annular body to an outermost trench of the plurality of annular trenches.
    Type: Application
    Filed: December 14, 2020
    Publication date: June 16, 2022
    Inventors: Kirankumar Neelasandra SAVANDAIAH, Shane LAVAN, Sundarapandian Ramalinga Vijayalakshmi REDDY, Randal Dean SCHMIEDING, Yong CAO