Abstract: In some embodiments, a semiconductor wafer testing system comprises a first plate configured to couple to a probe head, the first plate including a first alignment feature, a biasing member, a stopper, and pins. The system also comprises a second plate configured to fasten to the first plate and including a second alignment feature configured to engage with the first alignment feature. The first and second alignment features are configured to align the pins with a test wafer positioned between the first and second plates. The biasing member and the stopper are configured to cooperate to regulate a pressure with which the test wafer contacts the pins when the second plate is fastened to the first plate.

Abstract: In some embodiments, a semiconductor wafer testing system comprises a first plate configured to couple to a probe head, the first plate including a first alignment feature, a biasing member, a stopper, and pins. The system also comprises a second plate configured to fasten to the first plate and including a second alignment feature configured to engage with the first alignment feature. The first and second alignment features are configured to align the pins with a test wafer positioned between the first and second plates. The biasing member and the stopper are configured to cooperate to regulate a pressure with which the test wafer contacts the pins when the second plate is fastened to the first plate.

Abstract: A test fixture includes a mother board that has test signal lines configured to couple to a test station. The mother board includes a recessed region with contact pads coupled to the test signal lines. A daughter board is engaged with the recessed region such that a top surface of the daughter board is approximately coplanar with a top surface of the mother board. The daughter board includes test signal lines coupled to contact pads on the daughter board. The contact pads on the daughter board align with the contact pads on the mother board and are permanently coupled by sintered bonds.