Patents by Inventor RANDAL SCHMIEDING

RANDAL SCHMIEDING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for substrate edge uniformity
    Patent number: 11056325
    Abstract: A movable substrate support with a top surface for holding a substrate, when present, is used in conjunction with a cover ring that is stationary to adjust for a shadow effect to control substrate edge uniformity during deposition processes. The cover ring is held stationary by an electrically isolated spacer that engages with a grounded shield in the process volume of a semiconductor process chamber. A controller adjusts the substrate support in response to deposition material on a top surface of the cover ring to maintain the shadow effect and substrate edge uniformity.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: July 6, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Schmieding, Yong Cao, Xianmin Tang, William Johanson
  • METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY
    Publication number: 20190189407
    Abstract: A movable substrate support with a top surface for holding a substrate, when present, is used in conjunction with a cover ring that is stationary to adjust for a shadow effect to control substrate edge uniformity during deposition processes. The cover ring is held stationary by an electrically isolated spacer that engages with a grounded shield in the process volume of a semiconductor process chamber. A controller adjusts the substrate support in response to deposition material on a top surface of the cover ring to maintain the shadow effect and substrate edge uniformity.
    Type: Application
    Filed: December 11, 2018
    Publication date: June 20, 2019
    Inventors: THANH X. NGUYEN, ALEXANDER JANSEN, YANA CHENG, RANDAL SCHMIEDING, YONG CAO, XIANMIN TANG, WILLIAM JOHANSON