Patents by Inventor Randall Percival

Randall Percival has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for a gas field ionization source
    Patent number: 9159527
    Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
  • Ion sources, systems and methods
    Patent number: 8461557
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: June 11, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
  • Increasing current in charged particle sources and systems
    Patent number: 8124941
    Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
    Type: Grant
    Filed: June 29, 2009
    Date of Patent: February 28, 2012
    Assignee: Carl Zeiss NTS, LLC
    Inventors: John A. Notte, IV, Randall Percival, Colin A. Sanford, Alexander Grohloski
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20110240853
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Application
    Filed: June 13, 2008
    Publication date: October 6, 2011
    Applicant: CARL ZEISS NTS, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
  • INCREASING CURRENT IN CHARGED PARTICLE SOURCES AND SYSTEMS
    Publication number: 20100012839
    Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
    Type: Application
    Filed: June 29, 2009
    Publication date: January 21, 2010
    Applicant: CARL ZEISS SMT INC.
    Inventors: John A. Notte, IV, Randall Percival, Colin A. Sanford, Alexander Grohloski
  • SYSTEMS AND METHODS FOR A GAS FIELD IONIZATION SOURCE
    Publication number: 20080217555
    Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
    Type: Application
    Filed: April 10, 2008
    Publication date: September 11, 2008
    Inventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
  • Systems and methods for a gas field ionization source
    Publication number: 20070228287
    Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
    Type: Application
    Filed: March 20, 2006
    Publication date: October 4, 2007
    Applicant: Alis Technology Corporation
    Inventors: Billy Ward, Louis Farkas, John Notte, Randall Percival
  • Ion sources, systems and methods
    Publication number: 20070221843
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: September 27, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070210250
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: September 13, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Lars Markwort, Dirk Aderhold
  • Ion sources, systems and methods
    Publication number: 20070210251
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: September 13, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070205375
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: September 6, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Shawn McVey, Johannes Bihr
  • Ion sources, systems and methods
    Publication number: 20070194251
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: August 23, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Ion sources, systems and methods
    Publication number: 20070194226
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: August 23, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Lars Markwort, Dirk Aderhold
  • Ion sources, systems and methods
    Publication number: 20070187621
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: August 16, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Ulrich Mantz, Michael Steigerwald
  • Ion sources, systems and methods
    Publication number: 20070158556
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070158558
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070158580
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070158581
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070158557
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill
  • Ion sources, systems and methods
    Publication number: 20070158582
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: November 15, 2006
    Publication date: July 12, 2007
    Inventors: Billy Ward, John Notte, Louis Farkas, Randall Percival, Raymond Hill, Alexander Groholski, Richard Comunale