Patents by Inventor Randall W. Chance

Randall W. Chance has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for converting reticle configurations and methods for modifying reticles
    Patent number: 7592105
    Abstract: The invention includes methods of converting reticles from configurations suitable for utilization with later generation (shorter wavelength) stepper radiations to configurations suitable for utilization with earlier generation (longer wavelength) stepper radiations. The invention can be utilized for converting a reticle from a configuration suitable for 193 nanometer wavelength radiation to a configuration suitable for 248 nanometer wavelength radiation. In such aspect, a quartz-containing material of a substrate can be protected with a patterned layer consisting essentially of molybdenum and silicon while the quartz-containing material is subjected to a dry etch.
    Type: Grant
    Filed: July 13, 2006
    Date of Patent: September 22, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Randall W. Chance, J. Brett Rolfson, Azeddine Zerrade
  • Methods for converting reticle configurations
    Patent number: 7147974
    Abstract: The invention includes methods of converting reticles from configurations suitable for utilization with later generation (shorter wavelength) stepper radiations to configurations suitable for utilization with earlier generation (longer wavelength) stepper radiations. The invention can be utilized for converting a reticle from a configuration suitable for 193 nanometer wavelength radiation to a configuration suitable for 248 nanometer wavelength radiation. In such aspect, a quartz-containing material of a substrate can be protected with a patterned layer consisting essentially of molybdenum and silicon while the quartz-containing material is subjected to a dry etch.
    Type: Grant
    Filed: October 14, 2003
    Date of Patent: December 12, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Randall W. Chance, J. Brett Rolfson, Azeddine Zerrade