Patents by Inventor Randhir Singh Thakur

Randhir Singh Thakur has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon nitride film with stress control
    Publication number: 20060009041
    Abstract: An assembly comprises a multilayer nitride stack having nitride etch stop layers formed on top of one another, each of the nitride etch stop layers is formed using a film forming process. A method of making the multilayer nitride stack includes placing a substrate in a single wafer deposition chamber and thermally shocking the substrate momentarily prior to deposition. A first nitride etch stop layer is deposited over the substrate. A second nitride etch stop layer is deposited over the first nitride etch stop layer.
    Type: Application
    Filed: July 6, 2004
    Publication date: January 12, 2006
    Inventors: R. Iyer, Andrew Lam, Yuji Maeda, Thomas Mele, Faran Nouri, Jacob Smith, Sean Seutter, Sanjeev Tandon, Randhir Singh Thakur, Sunderraj Thirupapuliyur