Patents by Inventor Randolph H. Schnitzel

Randolph H. Schnitzel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion milling of thin metal films
    Patent number: 4248688
    Abstract: Metals such as platinum and palladium are preferentially removed in the presence of their metal silicides by ion milling in a noble gas atmosphere such as argon. The process can be used on semiconductor chips to remove excess platinum after platinum silicide has been formed in the contact holes.
    Type: Grant
    Filed: September 4, 1979
    Date of Patent: February 3, 1981
    Assignee: International Business Machines Corporation
    Inventors: Helmut M. Gartner, Steve I. Petvai, Homi G. Sarkary, Randolph H. Schnitzel