Patents by Inventor Randolph William DUDLEY, JR.

Randolph William DUDLEY, JR. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES
    Publication number: 20120255635
    Abstract: Embodiments described herein generally relate to methods and apparatus for refurbishing a gas distribution plate assembly utilized in a deposition chamber or etch chamber. In one embodiment, a method for refurbishing a gas distribution plate assembly is provided. The method includes urging a faceplate of a gas distribution plate assembly against a polishing pad of a polishing device, the faceplate having a plurality of gas distribution holes disposed therein, providing relative motion between the faceplate and the polishing pad, and polishing the faceplate against the polishing pad.
    Type: Application
    Filed: April 9, 2012
    Publication date: October 11, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Sumanth BANDA, Jennifer Y. SUN, Ren-Guan DUAN, Thomas J. Graves, Wendell G. BOYD, JR., Randolph William DUDLEY, JR., Khoi DOAN, William M. LU