Abstract: A shear-mode quartz resonator designed to mechanically oscillate at a predetermined frequency and electronic circuits for inhibiting oscillation of the shear-mode quartz resonator in response to externally applied mechanical forces which otherwise induce mechanical vibration of the shear-mode quartz resonator at frequencies significantly less than the predetermined frequency. The shear-mode quartz resonator includes a cantilevered quartz beam having relatively large metallic electrodes attached on opposite sides thereof, the relatively large metallic electrodes, in use, being coupled to an external oscillator circuit. The beam also has relatively smaller sense and rebalance electrodes attached on the same opposite sides of said quartz beam as said relatively large metallic electrodes. The relatively smaller sense and rebalance electrodes being coupled, in use, with said electronic circuits for inhibiting oscillation of the shear-mode quartz resonator in response to externally applied mechanical forces.

Abstract: A 3-dimensional opto-electronic system employs an optical communications channel between spaced circuit substrates. The beam from an in-line laser on one substrate is deflected by a turning mirror that is monolithically integrated on the substrate along with the laser and its associated electronic circuitry, and directed to an optical detector on another substrate. The deflection is accomplished with a turning mirror that is specially fabricated with a focused ion beam (FIB) so that it focuses or collimates as well as deflects the laser beam onto the photodetector. The mirror is initially formed with a flat surface, and is thereafter processed with the FIB to produce focusing curvatures in both x and y directions. The mirror is preferably spaced away from the laser, and is illuminated over substantially the full laser height to maximize its focal length for a given reflected spot size.

Abstract: A 3-dimensional opto-electronic system employs an optical communications channel between spaced circuit substrates. The beam from an in-line laser on one substrate is deflected by a turning mirror that is monolithically integrated on the substrate along with the laser and its associated electronic circuitry, and directed to an optical detector on another substrate. The deflection is accomplished with a turning mirror that is specially fabricated with a focused ion beam (FIB) so that it focuses or collimates as well as deflects the laser beam onto the photodetector. The mirror is initially formed with a flat surface, and is thereafter processed with the FIB to produce focusing curvatures in both x and y directions. The mirror is preferably spaced away from the laser, and is illuminated over substantially the full laser height to maximize its focal length for a given reflected spot size.