Patents by Inventor Randy Raynaldo Corral

Randy Raynaldo Corral has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROCESS ABNORMALITY IDENTIFICATION USING MEASUREMENT VIOLATION ANALYSIS
    Publication number: 20230052392
    Abstract: The subject matter of this specification can be implemented in, among other things, a method, system, and/or device to receive current metrology data for an operation on a current sample in a fabrication process. The metrology data includes a current value for a parameter at each of one or more locations on the current sample. The method further includes determining a current rate of change of the parameter value for each of the one or more locations. The current rate of change is associated with the current sample. The method further includes identifying one or more violating locations each having an associated current rate of change of the parameter value that is greater than an associated reference rate of change of the parameter value, and identifying an instance of abnormality of the fabrication process based on the one or more violating locations.
    Type: Application
    Filed: October 31, 2022
    Publication date: February 16, 2023
    Inventors: Selim Nahas, Joseph James Dox, Vishali Ragam, Eric J. Warren, Shijing Wang, Charles Largo, Christopher Reeves, Randy Raynaldo Corral
  • Process abnormality identification using measurement violation analysis
    Patent number: 11487848
    Abstract: The subject matter of this specification can be implemented in, among other things, a method, system, and/or device to receive current metrology data for an operation on a current sample in a fabrication process. The metrology data includes a current value for a parameter at each of one or more locations on the current sample. The method includes obtaining a reference rate of change of the parameter value of the parameter for each of the one or more locations. The method further includes determining a current rate of change of the parameter value for each of the one or more locations. The current rate of change is associated with the current sample. The method further includes comparing the current rate of change of the parameter value to the reference rate of change of the parameter value and identifying an instance of abnormality of the fabrication process based on the comparison.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: November 1, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Selim Nahas, Joseph James Dox, Vishali Ragam, Eric J. Warren, Shijing Wang, Charles Largo, Christopher Reeves, Randy Raynaldo Corral
  • PROCESS ABNORMALITY IDENTIFICATION USING MEASUREMENT VIOLATION ANALYSIS
    Publication number: 20220246454
    Abstract: The subject matter of this specification can be implemented in, among other things, a method, system, and/or device to receive current metrology data for an operation on a current sample in a fabrication process. The metrology data includes a current value for a parameter at each of one or more locations on the current sample. The method includes obtaining a reference rate of change of the parameter value of the parameter for each of the one or more locations. The method further includes determining a current rate of change of the parameter value for each of the one or more locations. The current rate of change is associated with the current sample. The method further includes comparing the current rate of change of the parameter value to the reference rate of change of the parameter value and identifying an instance of abnormality of the fabrication process based on the comparison.
    Type: Application
    Filed: January 29, 2021
    Publication date: August 4, 2022
    Inventors: Selim Nahas, Joseph James Dox, Vishali Ragam, Eric J. Warren, Shijing Wang, Charles Largo, Christopher Reeves, Randy Raynaldo Corral