Patents by Inventor Randy VRANA

Randy VRANA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for coupling a hot wire source to a process chamber
    Patent number: 10269593
    Abstract: Apparatus for coupling a hot wire source to a process chamber is provided herein. In some embodiments, an apparatus for coupling a hot wire source to a process chamber may include: a housing having an open end and a through hole formed through a top and a bottom of the housing; and a filament assembly configured to be disposed within the housing, the filament assembly having a frame and a plurality of filaments disposed across the frame, wherein the plurality of filaments of the filament assembly are substantially parallel with the top and the bottom of the housing and at least a portion of the plurality of filaments are disposed within the through hole of the housing when the filament assembly is disposed within the housing.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: April 23, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joe Griffith Cruz, Hanh Nguyen, Randy Vrana, Karl Armstrong
  • APPARATUS FOR COUPLING A HOT WIRE SOURCE TO A PROCESS CHAMBER
    Publication number: 20160005631
    Abstract: Apparatus for coupling a hot wire source to a process chamber is provided herein. In some embodiments, an apparatus for coupling a hot wire source to a process chamber may include: a housing having an open end and a through hole formed through a top and a bottom of the housing; and a filament assembly configured to be disposed within the housing, the filament assembly having a frame and a plurality of filaments disposed across the frame, wherein the plurality of filaments of the filament assembly are substantially parallel with the top and the bottom of the housing and at least a portion of the plurality of filaments are disposed within the through hole of the housing when the filament assembly is disposed within the housing.
    Type: Application
    Filed: March 7, 2014
    Publication date: January 7, 2016
    Inventors: Joe GRIFFITH CRUZ, Hanh NGUYEN, Randy VRANA, Karl ARMSTRONG