Patents by Inventor Rani S. Ghaida

Rani S. Ghaida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single-mask double-patterning lithography
    Patent number: 8415089
    Abstract: A method of printing a final layout on a wafer comprises printing a first pattern from a first mask located at a first position onto the wafer, shifting the first mask by a predetermined distance to a second position, printing the first pattern from the first mask located at the second position onto the wafer, and applying a trim mask to the wafer.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: April 9, 2013
    Assignee: The Regents of the University of California
    Inventors: Puneet Gupta, Rani S. Ghaida