Patents by Inventor Raoul Maarten Simon Knops

Raoul Maarten Simon Knops has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Projection system
    Patent number: 10248027
    Abstract: A projection system (PS1) for a lithographic apparatus comprises: an optical path (100); a plurality of sensors (S1-S4); one or more actuators (A1-A4); and a controller (CN). The optical path is operable to receive an input radiation beam (Bin) and to project an output radiation beam (Bout) onto a substrate to form an image. The optical path comprises: a plurality of optical elements (M1-M4), the plurality of optical elements comprising: a first set of at least two optical elements (M1, M4) and a second set of at least one optical element (M2, M3). Each sensor is associated with one of the plurality of optical elements and is operable to determine a position of that optical element. Each actuator is associated with one of the second set of optical elements and is operable to adjust that optical element.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: April 2, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Hans Butler, Raoul Maarten Simon Knops, Bob Streefkerk, Christiaan Louis Valentin, Jan Bernard Plechelmus Van Schoot, Wilhelmus Franciscus Johannes Simons, Leon Leonardus Franciscus Merkx, Robertus Johannes Marinus De Jongh, Roel Johannes Elisabeth Merry, Michael Frederik Ypma
  • PROJECTION SYSTEM
    Publication number: 20170363965
    Abstract: A projection system (PS1) for a lithographic apparatus comprises: an optical path (100); a plurality of sensors (S1-S4); one or more actuators (A1-A4); and a controller (CN). The optical path is operable to receive an input radiation beam (Bin) and to project an output radiation beam (Bout) onto a substrate to form an image. The optical path comprises: a plurality of optical elements (M1-M4), the plurality of optical elements comprising: a first set of at least two optical elements (M1, M4) and a second set of at least one optical element (M2, M3). Each sensor is associated with one of the plurality of optical elements and is operable to determine a position of that optical element. Each actuator is associated with one of the second set of optical elements and is operable to adjust that optical element.
    Type: Application
    Filed: November 16, 2015
    Publication date: December 21, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Hans BUTLER, Raoul Maarten Simon KNOPS, Bob STREEFKERK, Christiaan Louis VALENTIN, Jan Bernard Plechelmus VAN SCHOOT, Wilhelmus Franciscus Johanne SIMONS, Leon Leonardus Franciscus MERKX, Robertus Johannes Marinus DE JONGH, Roel Johannes Elisabeth MERRY, Michael Frederik YPMA
  • Cover for shielding a portion of an arc lamp
    Publication number: 20080170308
    Abstract: A cover to shield a portion of an arc lamp from electromagnetic radiation is disclosed. The cover has a reflective surface formed from a reflective material suitable to reflect the electromagnetic radiation.
    Type: Application
    Filed: January 12, 2007
    Publication date: July 17, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marcel Mathijs Theodore Marie Dierichs, Henricus Wilhelmus Maria Van Buel, Rene Alexander Dominicus Toussaint, Raoul Maarten Simon Knops