Abstract: The method for eliminating metallic lithium on a support comprises a plasma application step. The plasma is formed from a carbon source and an oxygen source with a power comprised between 50 and 400 W. It transforms the metallic lithium into lithium carbonate. The method then comprises a dissolution step of the lithium carbonate in an aqueous solution.

Abstract: The microcomponent, for example a microbattery, comprising a stack with at least two superposed layers on a substrate, is made using a single steel mask able to expand under the effect of temperature. The mask comprises at least one off-centered opening. The mask being at a first temperature, a first layer is deposited through the opening of the mask. The mask being at a second temperature, higher than the first temperature, a second layer is deposited through the opening of the mask. Finally, the mask being at a third temperature, higher than the second temperature, a third layer is deposited through the opening of the mask.

Abstract: The packaging device of a microbattery arranged on a flexible support comprises at least one thin layer forming a protective barrier deposited on the whole of the microbattery, and a flexible compensation cover above the barrier. The cover is made from a material, for example polymer, with a thickness tcomp and a Young's modulus Ecomp chosen such that the neutral plane of the assembly is situated at the level of the microbattery. The thickness of the cover is calculated, with an accuracy of ±30%, by the equation t comp = t sub ? in which tsub is the thickness of the support and ? the ratio of the Young's moduli of the cover and of the support.

Abstract: A new anode configuration (20) is proposed for a lithium microbattery (10). The anode (20) preferably consists of nanotubes or of nanowires (24) such that the empty space (26) left between the different components (24) provides compensation for the inherent swelling upon discharging the microbattery (10). With the absence of stresses on the electrolyte (18), the lifetime of the battery (10) may be increased.

Abstract: A microbattery has a support having a front face, a rear face, first and second current collectors arranged on the front face. A stack including a cathode and an anode separated by an electrolyte is arranged on the current collectors. The anode and cathode respectively contact the first and second current collectors. A protective layer covers the stack. The microbattery has connections in contact with the first and second current collectors, passing through the support from the front face to the rear face. The stack substantially covers of the front face of the support. A method for producing the mircobattery includes etching cavities, in the front face of the support, having a depth that is smaller than the thickness of the support, filing of the cavities with a conducting material and removing a layer of the rear face of the support to uncover the conducting material in the cavities.

Abstract: A microcomponent including: an electrochemical storage source; a first substrate including a first contact face; a second substrate including a second contact face; “at least one internal cavity formed from a first cavity recessed into the first contact face of the first substrate, or from a second cavity recessed into the second contact face of the second substrate, or from the first cavity recessed into the first contact face of the first substrate and the second cavity recessed into the second contact face of the second substrate, wherein the two substrates are integrated together via their respective contact faces and a sealing member, and said internal cavity contains the electrochemical storage source; and electrical connections between the electrochemical storage source and an external environment.

Abstract: During the production of a lithium microbattery, the electrolyte containing a lithiated compound is formed by successively depositing an electrolytic thin film, a first protective thin film that is chemically inert in relation to the lithium, and a first masking thin film on a substrate provided with current collectors and a cathode. A photolithography step is carried out on the first masking thin film in order to create a mask for selectively etching the first masking thin layer, and the first protective thin layer and the electrolytic thin film are then selectively etched in such a way as to form the electrolyte in the electrolytic thin film. This technique enables the electrolyte to be formed by photolithography and etching without causing any damage thereto.

Abstract: This lithium electrochemical device includes a stack of layers suitable for constituting a micro-battery deposited on a substrate and encapsulated using a protective cap sealed onto the substrate. It includes two collectors of the current generated by the micro-battery and at least one insulating layer inert as regards lithium. The collectors and the insulating layer or layers are deposited on the substrate. The protective cap is sealed onto the substrate using the layers constituting the current collectors and the insulating layer or layers. The cap has layers of the same nature, positioned in the same order in line with their respective layers deposited on the substrate, so that when the cap is sealed onto the substrate, the respective layers deposited on the cap and on the substrate come into contact with each other to provide the actual seal of the cap on the substrate.

Abstract: The invention relates to a process for manufacturing a lithiated electrode, which comprises: the deposition, on a substrate, of several layers of a non-lithiated electrode material and several lithium layers in order to form a multilayer consisting of an alternation of layers of non-lithiated electrode material and lithium layers, this multilayer starting with and terminating with a layer of non-lithiated electrode material; and the thermal annealing of the multilayer thus formed. It also relates to a lithiated electrode that can be obtained by this process and to the uses of this electrode: production of thin-film lithium batteries, especially microbatteries for chip cards, “smart” labels, horological articles, miniaturized communications tools, microsystems; production of thin-film supercapacitors and electrochromic cells.

Abstract: The invention relates to a solid electrolyte, to a process for its manufacture and also to devices comprising it. The electrolyte of the invention is an amorphous solid of formula SivOwCxHyLiz, in which v, w, x, y and z are atomic percentages with 0?v?40, 5?w?50, x>12, 10?y?40, 1?z?70, and 95%?v+w+x+y+z?100%. The electrolyte of the invention finds application in the field of electronics and microbatteries in particular.

Abstract: A lithium storage battery comprises a stack formed by a current collector comprising recessed zones, an electrode and a plurality of expansion cavities for the material forming the electrode. Each expansion cavity comprises at least one wall formed by a part of the electrode. Preferably the electrode is an electrode formed by at least one material able to insert and de-insert Li+ ions, the volume of which material increases when Li+ ions are inserted. The empty volume of the expansion cavities can thus be at least partially filled by a part of the material forming the electrode when Li+ cations are inserted in the material. The expansion cavities are formed in the recessed zones of the current collector.

Abstract: Method for producing a nanostructure based on interconnected nanowires, nanostructure and use as thermoelectric converter The nanostructure comprises two arrays of nanowires made from respectively n-doped and p-doped semi-conducting material. The nanowires of the first array, for example of n type, are formed for example by VLS growth. A droplet of electrically conducting material that acted as catalyst during the growth step remains on the tip of each nanowire of the first array at the end of growth. A nanowire of the second array is then formed around each nanowire of the first array by covering a layer of electrically insulating material formed around each nanowire of the first array, and the associated droplet, with a layer of p-type semi-conducting material. A droplet thus automatically connects a nanowire of the first array with a single coaxial nanowire of the second array. This type of nanostructure can be used in particular to form a thermoelectric converter.

Abstract: A new anode configuration (20) is proposed for a lithium microbattery (10). The anode (20) preferably consists of nanotubes or of nanowires (24) such that the empty space (26) left between the different components (24) provides compensation for the inherent swelling upon discharging the microbattery (10). With the absence of stresses on the electrolyte (18), the lifetime of the battery (10) may be increased.

Abstract: The invention relates to a microcomponent including an electrochemical storage source. It includes a first substrate (1) having a contact face (3) and a second substrate (10) having a contact face (13), at least one cavity (5) being formed in at least one of the substrates from the contact face, the two substrates (1, 10) being integrated with said contact faces by sealing means (18), wherein said cavity, thus sealed, contains the electrochemical storage source, and the microcomponent provides the electrical connections between the electrochemical storage source and the external environment.

Abstract: A microbattery has a support having a front face, a rear face, first and second current collectors arranged on the front face. A stack including a cathode and an anode separated by an electrolyte is arranged on the current collectors. The anode and cathode respectively contact the first and second current collectors. A protective layer covers the stack. The microbattery has connections in contact with the first and second current collectors, passing through the support from the front face to the rear face. The stack substantially covers of the front face of the support. A method for producing the mircobattery includes etching cavities, in the front face of the support, having a depth that is smaller than the thickness of the support, filing of the cavities with a conducting material and removing a layer of the rear face of the support to uncover the conducting material in the cavities.

Abstract: The electrodes are formed by surface coating and cold compression on metal strips. They are then assembled, by hot pressing, with an electrolytic membrane. The metal strips are then removed, preferably by mechanical detachment. Current collectors are then formed on each of the electrodes by PVD type techniques that are conventional in microelectronics. The resulting thin micro-battery with high surface capacity can then be integrated in an integrated circuit, in particular by bonding by means of indium connecting balls.

Abstract: During the production of a lithium microbattery, the electrolyte containing a lithiated compound is formed by successively depositing an electrolytic thin film, a first protective thin film that is chemically inert in relation to the lithium, and a first masking thin film on a substrate provided with current collectors and a cathode. A photolithography step is carried out on the first masking thin film in order to create a mask for selectively etching the first masking thin layer, and the first protective thin layer and the electrolytic thin film are then selectively etched in such a way as to form the electrolyte in the electrolytic thin film. This technique enables the electrolyte to be formed by photolithography and etching without causing any damage thereto.

Abstract: A lithium microbattery comprises a substrate on which at least one stack is arranged successively comprising a cathode, an electrolyte containing lithium and an anode consisting of metallic lithium. A protective envelope comprising at least first and second distinct superposed layers covers the stack to protect the same against external contamination. The first layer, deposited on the whole of the anode, comprises at least one material that is chemically inert with regard to lithium, selected from the group consisting of a hydrogenated amorphous silicon carbide, a hydrogenated amorphous silicon oxycarbide, hydrogenated amorphous carbon, fluorinated amorphous carbon and hydrogenated amorphous silicon. The second layer comprises a material selected from the group consisting of a hydrogenated amorphous silicon carbonitride, a hydrogenated amorphous silicon nitride and a fluorinated amorphous carbon.

Abstract: A microbattery comprises, in the form of thin layers, at least first and second electrodes between which a solid electrolyte is disposed. The first electrode and the electrolyte both comprise at least one common grouping of [XY1Y2Y3Y4] type, where X is located in a tetrahedron whose peaks are respectively formed by the chemical elements Y1, Y2, Y3 and Y4, the chemical element X being selected from the group consisting of phosphorus, boron, silicon, sulphur, molybdenum, vanadium and germanium and the chemical elements Y1, Y2, Y3 and Y4 being selected from the group consisting of sulphur, oxygen, fluorine and chlorine.

Abstract: In order to increase the capacity of an “all-solid” type micro-battery, the layer of electrolyte is structured: transversing cavities are created in the flat layer, advantageously at the level of patches of collector material, then filled by anode or cathode material.