Patents by Inventor Raquel Hellin Rico

Raquel Hellin Rico has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a hermetically sealed cavity
    Patent number: 8062497
    Abstract: One inventive aspect relates to a method for forming hermetically sealed cavities, e.g. semiconductor cavities comprising fragile devices, MEMS or NEMS devices. The method allows forming hermetically sealed cavities at a controlled atmosphere and pressure and at low temperatures, for example, at temperatures not exceeding about 200° C. The method further allows forming sealed cavities with short release times, for example, release times of about a few minutes to 30 minutes. The method may, for example, be used for zero level packaging of MEMS or NEMS devices.
    Type: Grant
    Filed: March 28, 2007
    Date of Patent: November 22, 2011
    Assignee: IMEC
    Inventors: Ann Witvrouw, Raquel Hellin Rico, Jean-Pierre Celis