Patents by Inventor Ratchana LIMARY

Ratchana LIMARY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240429040
    Abstract: A method for protecting a surface of a substrate during processing includes a) providing a solution forming a co-polymer having a ceiling temperature; b) dispensing the solution onto a surface of the substrate to form a sacrificial protective layer, wherein the co-polymer is kinetically trapped to allow storage at a temperature above the ceiling temperature; c) exposing the substrate to ambient conditions for a predetermined period; and d) de-polymerizing the sacrificial protective layer by using stimuli selected from a group consisting of ultraviolet (UV) light and heat.
    Type: Application
    Filed: September 6, 2024
    Publication date: December 26, 2024
    Inventors: Stephen M. SIRARD, Ratchana LIMARY, Yang PAN, Diane HYMES
  • Publication number: 20240312778
    Abstract: The present disclosure relates to use of a stimulus responsive polymer (SRP) as a capping material during direct metal-metal binding. Processes and layers employing an SRP are described herein.
    Type: Application
    Filed: September 9, 2021
    Publication date: September 19, 2024
    Inventors: Stephen J. BANIK, II, Bryan L. BUCKALEW, Stephen M. SIRARD, Gregory BLACHUT, Ratchana LIMARY, Diane HYMES, Justin OBERST, Priyanka SURESH
  • Publication number: 20230295412
    Abstract: The present disclosure relates to a stimulus responsive polymer (SRP) that includes a homopolymer. Methods, films, and formulations employing an SRP are also described herein.
    Type: Application
    Filed: July 23, 2021
    Publication date: September 21, 2023
    Inventors: Stephen M. SIRARD, Gregory BLACHUT, Ratchana LIMARY, Diane HYMES, Yang PAN
  • Publication number: 20220328338
    Abstract: The present disclosure relates to methods of forming a film including small molecules. Such methods can optionally include removing such small molecules, such as by way of sublimation, evaporation, or conversion to a more volatile form.
    Type: Application
    Filed: September 1, 2020
    Publication date: October 13, 2022
    Inventors: Gregory BLACHUT, Diane HYMES, Stephen M. SIRARD, Ratchana LIMARY, Christopher M. Bates
  • Publication number: 20140101964
    Abstract: An apparatus for delamination drying a substrate is provided. A chamber for receiving a substrate is provided. A chuck supports and clamps the substrate within the chamber. A temperature controller controls the temperature of the substrate and is able to cool the substrate. A vacuum pump is in fluid connection with the chamber. A tilting mechanism is able to tilt the chuck at least 90 degrees.
    Type: Application
    Filed: October 11, 2012
    Publication date: April 17, 2014
    Applicant: Lam Research Corporation
    Inventors: Stephen M. SIRARD, Diane HYMES, Alan M. SCHOEPP, Ratchana LIMARY