Patents by Inventor Ravichandra Palaparthi

Ravichandra Palaparthi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad with flow modifying groove network
    Publication number: 20060014477
    Abstract: A polishing pad (20) for polishing a wafer (32) or other article, the pad having a groove network (60) configured to vary the residence time across the wafer track of the reaction products formed by the interaction of reactants in the polishing medium (46) with structure on the wafer. The groove network has a first portion (72) that may extend substantially radially outward and a second portion (74) that is configured to vary the speed of the radially outward flow of the polishing medium.
    Type: Application
    Filed: June 7, 2005
    Publication date: January 19, 2006
    Inventor: Ravichandra Palaparthi
  • Polishing pad with oscillating path groove network
    Publication number: 20050266776
    Abstract: A polishing pad (20) for polishing a wafer (32) or other article, the pad having a groove network (60) configured to increase the residence time polishing medium (46) on the pad. The groove network has a first portion (72) that may extend substantially radially outwardly and an oscillating portion (74) that begins at a transition point (76) and is configured to slow the radially outward flow of the polishing medium.
    Type: Application
    Filed: May 27, 2004
    Publication date: December 1, 2005
    Inventors: Carolina Elmufdi, Ravichandra Palaparthi