Patents by Inventor Ravikiran Attota

Ravikiran Attota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Zeroeth order imaging
    Patent number: 7812943
    Abstract: A method of imaging critical dimensions by measuring the zeroeth order of diffracted light. The method involves providing a target, directing light onto the target so as to cause the target to diffract the light. The zeroeth order of the diffracted light is collected and analyzed to determine structural features of the target. The target can be an article of manufacture, such as a semiconductor device, or a separate target that is provided or fabricated on an article of manufacture. One of at least the wavelength and the angle at which the light is directed onto the target can be scanned. The target can fill all or only a portion of the field of view.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: October 12, 2010
    Assignees: The United States of America as represented by the Secretary of Commerce, The National Institute of Standards and Technology
    Inventors: Richard M. Silver, Ravikiran Attota, Robert Larrabee
  • Zeroeth Order Imaging
    Publication number: 20090109446
    Abstract: A method of imaging critical dimensions by measuring the zeroeth order of diffracted light. The method involves providing a target, directing light onto the target so as to cause the target to diffract the light. The zeroeth order of the diffracted light is collected and analyzed to determine structural features of the target. The target can be an article of manufacture, such as a semiconductor device, or a separate target that is provided or fabricated on an article of manufacture. One of at least the wavelength and the angle at which the light is directed onto the target can be scanned. The target can fill all or only a portion of the field of view.
    Type: Application
    Filed: October 29, 2007
    Publication date: April 30, 2009
    Inventors: Richard M. Silver, Ravikiran Attota, Robert Larrabee