Patents by Inventor Ray-Nien Kwo

Ray-Nien Kwo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for manufacturing semiconductor device
    Patent number: 8859441
    Abstract: The present invention provides a system and method for manufacturing a semiconductor device including a substrate and a high-? dielectric layer on the substrate. The system comprises a modular track; a substrate-forming chamber connected with the modular track for forming the substrate; and an atomic layer deposition (ALD) chamber connected with the modular track for providing the high-? dielectric layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: October 14, 2014
    Inventors: Ming-Hwei Hong, Ray-Nien Kwo, Tun-Wen Pi, Mao-Lin Huang, Yu-Hsing Chang, Pen Chang, Chun-An Lin, Tsung-Da Lin
  • METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20130267077
    Abstract: The present invention provides a system and method for manufacturing a semiconductor device including a substrate and a high-? dielectric layer on the substrate. The system comprises a modular track; a substrate-forming chamber connected with the modular track for forming the substrate; and an atomic layer deposition (ALD) chamber connected with the modular track for providing the high-? dielectric layer.
    Type: Application
    Filed: April 5, 2012
    Publication date: October 10, 2013
    Inventors: Ming-Hwei Hong, Ray-Nien Kwo, Tun-Wen Pi, Mao-Lin Huang, Yu-Hsing Chang, Pen Chang, Chun-An Lin, Tsung-Da Lin