Patents by Inventor Ray-Wen Tsai

Ray-Wen Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precise mechanism for load port adjustment
    Patent number: 6732442
    Abstract: An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: May 11, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Yaw-Wen Wu, Tung-Gan Cheng, Tung-Liang Wua, Cheng-Chao Lin, Hsueh-Cheng Lin, Chia-Fu Tsai, Chih-Jung Yeh, Hung-Tse Huang, Ray-Wen Tsai
  • Precise mechanism for load port adjustment
    Publication number: 20040006883
    Abstract: An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.
    Type: Application
    Filed: July 15, 2002
    Publication date: January 15, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yaw-Wen Wu, Tung-Gan Cheng, Tung-Liang Wua, Cheng-Chao Lin, Hsueh-Cheng Lin, Chia-Fu Tsai, Chih-Jung Yeh, Hung-Tse Huang, Ray-Wen Tsai