Patents by Inventor Raylon M. Yow

Raylon M. Yow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cleaning a wafer
    Patent number: 6766813
    Abstract: The present invention provides a method of cleaning a wafer. The method comprises suspending the wafer beneath a vacuum chuck. The vacuum chuck contains an acoustic wave emitter. The acoustic wave emitter is positioned within the vacuum chuck to prevent the acoustic wave emitter from contacting the surface of the wafer. The method further comprises applying acoustic waves to the wafer.
    Type: Grant
    Filed: August 1, 2000
    Date of Patent: July 27, 2004
    Assignee: Board of Regents, The University of Texas System
    Inventors: Anthony Sayka, Dhiraj K. Sardar, Frederick J. Barrera, Raylon M. Yow