Patents by Inventor Raymond Beeren

Raymond Beeren has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and lithographic apparatus cleaning method
    Publication number: 20080049201
    Abstract: An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.
    Type: Application
    Filed: May 18, 2007
    Publication date: February 28, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marco Stavenga, Hans Jansen, Peter Wanten, Johannes Leonardus Cuijpers, Raymond Beeren, Richard Bruls, Martinus Leenders, Anthonius Petrus De Jong