Patents by Inventor Raymond Gerardus Beeren

Raymond Gerardus Beeren has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
    Publication number: 20090015805
    Abstract: A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.
    Type: Application
    Filed: April 11, 2008
    Publication date: January 15, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bauke Jansen, Raymond Gerardus Beeren, Anthonius Martinus De Jong, Kornelis Tijmen Hoekerd
  • Cleaning device and a lithographic apparatus cleaning method
    Publication number: 20090015804
    Abstract: A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.
    Type: Application
    Filed: April 11, 2008
    Publication date: January 15, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Anthonius Martinus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Cuijpers, Raymond Gerardus Beeren, Kornelis Tijmen Hoekerd