Abstract: A method to sterilize the surfaces of objects placed in a continuous flow of a low temperature, low pressure gas plasma, containing small amounts of aromatic, heterocyclic and saturated or unsaturated acyclic aldehydes alone or mixtures thereof. Said gas plasma is a partially ionized gas composed of ions, electrons and neutral species. It is created by electromagnetic discharges at subatmospheric pressure in the 1 to 10,000 Megahertz range, and corresponds to a minimum average spatial energy density of 0.001 watts per cubic centimeter.The gas plasma may also contain other vaporized cidal agents. Contrary to most sterilant gases, the method is safe, allows quick handling of heat sensitive items, does not corrode equipment and does not leave toxic residues.