Patents by Inventor Raymond T. Savard
Raymond T. Savard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8047815Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.Type: GrantFiled: November 12, 2007Date of Patent: November 1, 2011Assignee: Integrated Designs L.P.Inventors: Raymond T. Savard, Greg Gray, John Laessle
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Publication number: 20090016903Abstract: A high purity, high precision pump capable of pumping more than one type of chemistry or process fluid without requiring cleaning or changing of surfaces contacting the processing fluid. The pump employs a single drive mechanism coupled in parallel with multiple pumping chambers, each capable of handling a different type of manufacturing fluid. The pump can be utilized as part of a single stage or multi-stage pump system.Type: ApplicationFiled: July 13, 2007Publication date: January 15, 2009Applicant: INTEGRATED DESIGNS L.P.Inventors: Raymond T. Savard, Greg Gray, Jack Laessle
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Publication number: 20090016909Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.Type: ApplicationFiled: November 12, 2007Publication date: January 15, 2009Applicant: INTEGRATED DESIGNS L.P.Inventors: Raymond T. Savard, Greg Gray
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Publication number: 20080142102Abstract: A one-way, self-actuating, and springless check valve for high purity fluid handling system and components, including pumps and fluid passageways, includes fixed, but resilient, deformable valve member that cooperates with a valve seat to stop fluid flow in one direction and to bend away from the valve seat when fluid pressure exceeds a predetermined level. The check valve is deployed in a high purity metering pump.Type: ApplicationFiled: December 18, 2006Publication date: June 19, 2008Inventor: Raymond T. Savard
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Publication number: 20080041488Abstract: A self-cleaning process fluid valve assembly for dispensing of process liquids used in semiconductor fabrication processes comprises a valve for selectively flowing solvent from a solvent source through a dispense control valve and dispense tip.Type: ApplicationFiled: August 18, 2006Publication date: February 21, 2008Inventors: Raymond T. Savard, Jack Laessle, Greg Gray
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Patent number: 6837484Abstract: Anti-pumping dispense valves, constructed according to principles of this invention, comprise a fluid transport housing having a fluid inlet passage extending into the housing, a fluid outlet passage extending out of the housing, and a fluid transport chamber disposed within the housing. The fluid transport chamber includes an valve seat. An actuator housing is attached to the fluid transport housing and includes an actuator chamber that is in contact with the fluid transport chambers. A diaphragm/poppet assembly is disposed within the fluid transport chamber and comprises a poppet positioned downstream of the seat for placement against the seat to stop fluid flow through the first fluid transport chamber. An actuator is disposed within the actuator chamber for moving the diaphragm/poppet assembly.Type: GrantFiled: July 10, 2002Date of Patent: January 4, 2005Assignee: Saint-Gobain Performance Plastics, Inc.Inventors: Kenji A. Kingsford, Mario Fregoso, Raymond T. Savard
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Patent number: 6742993Abstract: A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.Type: GrantFiled: November 11, 2002Date of Patent: June 1, 2004Assignee: Integrated Designs, L.P.Inventors: Raymond T. Savard, John C. Vines
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Publication number: 20040007686Abstract: Anti-pumping dispense valves, constructed according to principles of this invention, comprise a fluid transport housing having a fluid inlet passage extending into the housing, a fluid outlet passage extending out of the housing, and a fluid transport chamber disposed within the housing. The fluid transport chamber includes an valve seat. An actuator housing is attached to the fluid transport housing and includes an actuator chamber that is in contact with the fluid transport chambers. A diaphragm/poppet assembly is disposed within the fluid transport chamber and comprises a poppet positioned downstream of the seat for placement against the seat to stop fluid flow through the first fluid transport chamber. An actuator is disposed within the actuator chamber for moving the diaphragm/poppet assembly.Type: ApplicationFiled: July 10, 2002Publication date: January 15, 2004Inventors: Kenji A. Kingsford, Mario Fregoso, Raymond T. Savard
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Patent number: 6554579Abstract: A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter from entering the pump a reservoir is provided between the filter and the source of the fluid. Air from the filter is vented into the reservoir through a vent tube. A vacuum is used to draw air from the filter and, through the reservoir.Type: GrantFiled: March 28, 2002Date of Patent: April 29, 2003Assignee: Integrated Designs, L.P.Inventors: Carl A. Martin, Vernon H. Foersterling, Darko Hadzidedic, Raymond T. Savard, Gary Minor
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Publication number: 20030062382Abstract: A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.Type: ApplicationFiled: November 11, 2002Publication date: April 3, 2003Applicant: Integrated Designs, L.P.Inventors: Raymond T. Savard, John C. Vines
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Patent number: 6478547Abstract: A method and system for dispensing a precise amount of a fluid utilizing a rolling membrane pumping system is disclosed. In the preferred embodiment, the method comprises calculating an amount by which to change a dispense based at least in part on a predicted membrane flex if a particular dispense is other than a first dispense, wherein said predicted membrane flex is based at least in part on a maximum pump chamber pressure during the first dispense; calculating an amount by which to change a dispense based at least in part on a shape of the membrane if a particular dispense is a first dispense; moving a piston in the pumping system based at least in part on the calculated amount; opening an output valve of the pumping system; monitoring the pump chamber pressure to detect a sudden decrease in said pump chamber pressure to signal a mechanical failure in the pumping system; and determining a maximum pressure in the pump chamber during the movement of the piston.Type: GrantFiled: October 18, 2000Date of Patent: November 12, 2002Assignee: Integrated Designs L.P.Inventors: Raymond T. Savard, John C. Vines
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Publication number: 20020158079Abstract: A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter from entering the pump a reservoir is provided between the filter and the source of the fluid. Air from the filter is vented into the reservoir through a vent tube. A vacuum is used to draw air from the filter and, through the reservoir.Type: ApplicationFiled: March 28, 2002Publication date: October 31, 2002Inventors: Carl A. Martin, Vernon H. Foersterling, Darko Hadzidedic, Raymond T. Savard, Gary Minor