Patents by Inventor Rebecca Joyce-Woehrmann

Rebecca Joyce-Woehrmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Statistical method and automated system for detection of particulate matter on wafer processing chucks
    Publication number: 20080126014
    Abstract: A method of detecting the presence of particulate matter on a wafer chuck during semiconductor wafer processing involves providing data which is related to a positional perturbation of a semiconductor wafer which is present during the processing of the wafer, providing a threshold which is based on historical statistics obtained from the prior processing of wafers, and comparing the data to the threshold to determine if a predetermined condition is violated, which corresponds to the presence of particulate matter on the chuck.
    Type: Application
    Filed: August 22, 2006
    Publication date: May 29, 2008
    Inventors: Yuanting Cui, Rebecca Joyce-Woehrmann