Patents by Inventor Rebecca K. Kelley

Rebecca K. Kelley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTROSTATIC SUBSTRATE HOLDER WITH NON-PLANAR SURFACE AND METHOD OF ETCHING
    Publication number: 20170069518
    Abstract: An apparatus and method of etching. The apparatus including a support substrate having a top surface; a stack of a multiplicity of layers formed on the top surface of the support substrate from a lowermost layer on the top surface of the support substrate to a topmost layer that is furthest from the support substrate; and wherein an entirety of the top surface of the topmost layer is not planar and at least one of the multiplicity of layers that is not the topmost layer is an electrically conductive layer.
    Type: Application
    Filed: September 4, 2015
    Publication date: March 9, 2017
    Inventors: Brett Cucci, Thai Doan, Jeffrey P. Gambino, Rebecca K. Kelley, Jed H. Rankin, Daniel S. Vanslette