Abstract: A method for controlling a concentration of donors in an Al-alloyed gallium oxide crystal structure includes implanting a Group IV element as a donor impurity into the crystal structure with an ion implantation process and annealing the implanted crystal structure to activate the Group IV element to form an electrically conductive region. The method may further include depositing one or more electrically conductive materials on at least a portion of the implanted crystal structure to form an ohmic contact. Examples of semiconductor devices are also disclosed and include a layer of an Al-alloyed gallium oxide crystal structure, at least one region including the crystal structure implanted with a Group IV element as a donor impurity with an ion implantation process and annealed to activate the Group IV element, an ohmic contact including one or more electrically conductive materials deposited on the at least one region.

Abstract: An electromagnetic transducer includes a magnetic assembly and a coil assembly. The magnetic assembly may include an inner magnet subassembly and an outer magnet subassembly. The inner magnet subassembly and the outer magnet subassembly each have a plurality of axial magnets arranged in a stacked configuration with a spacer disposed between vertically adjacent axial magnets. The coil assembly includes an inner coil subassembly and an outer coil subassembly. The inner coil subassembly is disposed between the inner magnet subassembly and the outer magnet subassembly, and the outer coil subassembly is disposed around the outer magnet subassembly. The coil assembly and the magnetic assembly are configured to move relative to each other.

Abstract: A charge pump with low-voltage startup is presented. The charge pump circuit is comprised of transistor pairs arranged in stages, where the charge pump circuit is configured to receive an input voltage and generate an output voltage whose magnitude is larger than magnitude of the input voltage. An energy storage device is configured to receive and store voltage from the charge pump circuit. A switching circuit is interfaced with the control terminals of the transistors in the charge pump circuit. In response to leakage current through the transistors in the charge pump circuit, the switching circuit switches on select transistors in the charge pump circuit while voltage stored by the energy storage device is below threshold voltage of the transistors in the charge pump circuit.

Abstract: A microsystem includes a base layer formed from an electrical insulating material. The base layer has an inner surface defining a cavity and an external surface opposed to the inner surface, and in direct communication with an environment. A cap layer and a microelectromechanical (MEMS) device layer are formed from electrical insulating material or an other electrical insulating material. The cap has an inner surface defining a cavity, and an external surface opposed to the inner surface, and in direct communication with the environment. A MEMS device on/in the MEMS device layer is disposed between the base and the cap. Respective adjacent portions of the base, the cap and the device substrate are bonded to define an enclosed space. The enclosed space at least partially includes the base cavity or the cap cavity. At least a portion of a MEMS device on the device layer is in the enclosed space.

Abstract: A charge pump with low-voltage startup is presented. The charge pump circuit is comprised of transistor pairs arranged in stages, where the charge pump circuit is configured to receive an input voltage and generate an output voltage whose magnitude is larger than magnitude of the input voltage. An energy storage device is configured to receive and store voltage from the charge pump circuit. A switching circuit is interfaced with the control terminals of the transistors in the charge pump circuit. In response to leakage current through the transistors in the charge pump circuit, the switching circuit switches on select transistors in the charge pump circuit while voltage stored by the energy storage device is below threshold voltage of the transistors in the charge pump circuit.

Abstract: An electromagnetic transducer includes a magnetic assembly and a coil assembly. The magnetic assembly may include an inner magnet subassembly and an outer magnet subassembly. The inner magnet subassembly and the outer magnet subassembly each have a plurality of axial magnets arranged in a stacked configuration with a spacer disposed between vertically adjacent axial magnets. The coil assembly includes an inner coil subassembly and an outer coil subassembly. The inner coil subassembly is disposed between the inner magnet subassembly and the outer magnet subassembly, and the outer coil subassembly is disposed around the outer magnet subassembly. The coil assembly and the magnetic assembly are configured to move relative to each other.

Abstract: A micro-hydraulic device includes an enclosure. The enclosure includes a substrate having a first surface and a second surface distal to the first surface. The enclosure further includes a chamber defined between the first surface and the second surface. The chamber is defined by a wall substantially from the first surface to the second surface. The enclosure includes a first flexible membrane sealingly connected to the first surface and disposed over the chamber; and a second flexible membrane sealingly connected to the second surface disposed over the chamber distal to the first flexible membrane. The device further includes an internal fluid retained within the enclosure and a rigid electrode fixed within the chamber having an aperture therein. A flexible electrode is disposed on the second flexible membrane opposite the rigid electrode.

Abstract: A fluid flow sensor that utilizes hot-wire anemometry and is a small, light weight, cost effective, easily manufactureable, and low power consuming device. The fluid flow sensor operates by exposing a hot wire loop to a fluid stream such that the amount of heat lost to fluid convection is a function of one or more fluid-related parameters (e.g., fluid speed, fluid type, fluid density, etc.). The heat loss affects the resistance in the wire loop, which can then be used to estimate the fluid speed or other fluid-related parameter. According to an exemplary embodiment, the fluid flow sensor includes one or more wire loops that are made from pre-formed wires and are wire bonded, micro-welded or otherwise non-monolithically attached to a substrate that may or may not include embedded sensor circuitry.

Abstract: A three-dimensional microelectromechanical systems (MEMS) structure includes a substrate and having a height extending outwardly from the substrate and a largest lateral dimension orthogonal to the height. The largest lateral dimension is smaller than the height. A transducing element is operatively connected to the hair-like core and embedded within, formed on an outer surface of, or disposed at a root of the hair-like core. The transducing element is to receive an electrical core signal or a non-electrical core signal conveyed by the hair-like core. The transducing element is to convert the non-electrical core signal to an electrical output signal, convert the electrical core signal to an electrical output signal in a different format, convert the non-electrical core signal to a different non-electrical output signal, or convert the electrical core signal to a non-electrical output signal.

Abstract: A micro-hydraulic device includes an enclosure. The enclosure includes a substrate having a first surface and a second surface distal to the first surface. The enclosure further includes a chamber defined between the first surface and the second surface. The chamber is defined by a wall substantially from the first surface to the second surface. The enclosure includes a first flexible membrane sealingly connected to the first surface and disposed over the chamber; and a second flexible membrane sealingly connected to the second surface disposed over the chamber distal to the first flexible membrane. The device further includes an internal fluid retained within the enclosure and a rigid electrode fixed within the chamber having an aperture therein. A flexible electrode is disposed on the second flexible membrane opposite the rigid electrode.