Patents by Inventor Reed E. Spjut

Reed E. Spjut has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • UV-enhanced, in-line, infrared phosphorous diffusion furnace
    Publication number: 20010031229
    Abstract: A thermal processing apparatus for thermally processing a workpiece having a process chamber, a workpiece support positioned inside of the process chamber, a heater positioned inside of the process chamber to heat the workpiece; and an ultraviolet light source positioned inside of the process chamber to irradiate ultraviolet light onto the workpiece.
    Type: Application
    Filed: February 26, 2001
    Publication date: October 18, 2001
    Inventors: Reed E. Spjut, Raymond T. Kruzek, Carson T. Richert, Andrei Szilagyi