Patents by Inventor Reiki Kaneki

Reiki Kaneki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7880141
    Abstract: In the resin film evaluation method and method for manufacturing a semiconductor device applying the resin film evaluation method of the present invention, first, a substrate having a resin film formed on an insulating film with an opening in which the surface of the insulating film is exposed is irradiated with charged energetic particles. Then, the surface potentials of the substrate surface irradiated with charged energetic particles are measured. Based on the measurements, the difference in surface potential between the resin film and the insulating film exposed in the opening is obtained. Based on the difference in surface potential, a physical quantity such as the resin film residue count obtained after a given treatment is predicted. In this way, the degenerated layer formed on the surface of a resin film due to charged energetic particles such as implantation ions can be evaluated in a simple and highly accurate manner.
    Type: Grant
    Filed: November 28, 2007
    Date of Patent: February 1, 2011
    Assignee: Panasonic Corporation
    Inventors: Hisako Kamiyanagi, Satoshi Sibata, Reiki Kaneki, Kohei Miyagawa
  • Publication number: 20080128616
    Abstract: In the resin film evaluation method and method for manufacturing a semiconductor device applying the resin film evaluation method of the present invention, first, a substrate having a resin film formed on an insulating film with an opening in which the surface of the insulating film is exposed is irradiated with charged energetic particles. Then, the surface potentials of the substrate surface irradiated with charged energetic particles are measured. Based on the measurements, the difference in surface potential between the resin film and the insulating film exposed in the opening is obtained. Based on the difference in surface potential, a physical quantity such as the resin film residue count obtained after a given treatment is predicted. In this way, the degenerated layer formed on the surface of a resin film due to charged energetic particles such as implantation ions can be evaluated in a simple and highly accurate manner.
    Type: Application
    Filed: November 28, 2007
    Publication date: June 5, 2008
    Inventors: Hisako Kamiyanagi, Satoshi Sibata, Reiki Kaneki, Kohei Miyagawa