Abstract: An impedance matching network for plasma processes includes an input port being connectable to a radio frequency (RF) generator circuit, an output port being connectable to a load, and a transmission circuit. The transmission circuit connects the output port to the input port. The transmission circuit includes a first transmission line and a second transmission line, wherein the first transmission line is electrically connected to the input port, and wherein the second transmission line is electrically connected to the output port. The impedance matching network further includes a first impedance matching circuit configured to connect at least one reactance to the transmission circuit. The impedance matching network further includes a coupling element, wherein the first transmission line and the second transmission line are coupled to each other by the coupling element, and wherein the coupling element provides an inductive coupling between the first transmission line and the second transmission line.

Abstract: Disclosed is an N-way radio frequency, RF, splitter-combiner, comprising an inner conductor including a plurality of (N) stepped cross-section conductor branches extending radially and evenly circumferentially spaced in a reference plane R from a hub end; and a stepped cross-section conductor trunk extending perpendicularly to the reference plane R from the hub end. This avoids power imbalance and excessive attenuation.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: A high-frequency signal combiner comprises at least one first bridge coupler for the transformation of two input-end, first high-frequency signals into at least two output-end, first high-frequency signals in each case with identical power, and a second bridge coupler for the transformation of four input-end, second high-frequency signals, in each case with identical power, into an output-end, second high-frequency signal, of which the power corresponds to the summated power of the four input-end, second high-frequency signals. In this context, the four input-end, second high-frequency signals are each supplied from one output-end, first high-frequency signal. In order to add an integer multiple of four high-frequency signals, a cascade of second bridge couplers is realized with a number of cascade stages corresponding to the integer multiple. In every cascade stage, every second bridge coupler of the preceding cascade stage is replaced respectively by four second bridge couplers.

Abstract: A high-frequency signal combiner comprises at least one first bridge coupler (1; 1?; 1?) for the transformation of two input-end, first high-frequency signals (IN1, IN2, IN3, IN4) into at least two output-end, first high-frequency signals (OUT1, OUT2, OUT3, OUT4), in each case with identical power, and a second bridge coupler (3?) for the transformation of four input-end, second high-frequency signals (IN5, IN6, IN7, IN8), in each case with identical power, into an output-end, second high-frequency signal (OUT5), of which the power corresponds to the summated power of the four input-end, second high-frequency signals (IN5, IN6, IN7, IN8). In this context, the four input-end, second high-frequency signals (IN5, IN6, IN7, IN8) are each supplied from one output-end, first high-frequency signal (OUT2, OUT4, OUT1, OUT3).