Abstract: The present invention relates to a substrate carrier for accommodating and transporting a substrate, to a changing station comprising such a substrate carrier as well as to a method for treating a substrate.

Abstract: The invention relates to a method and a device for aligning substrates (2) in an XY-plane. A polygonal, flat substrate (2), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner (12) of the substrate (2) is detected using image detecting means (9). In addition, the position coordinates of the substrate (2) are determined. Using evaluating means (10), the angular position of the corner (12) of the substrate (2) in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner (12) are calculated. The substrate (2) is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference.

Abstract: The invention relates to a method and a device for aligning substrates (2) in an XY-plane. A polygonal, flat substrate (2), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner (12) of the substrate (2) is detected using image detecting means (9). In addition, the position coordinates of the substrate (2) are determined. Using evaluating means (10), the angular position of the corner (12) of the substrate (2) in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner (12) are calculated. The substrate (2) is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference.

Abstract: Apparatus for holding and transporting a workpiece having a plane surface The apparatus allows the lifting, holding and transporting of a workpiece comprising an opening or impression, by using the Venturi effect of a gas stream between said apparatus and the workpiece.

Abstract: The present invention provides an apparatus and a method for avoiding gas bubbles when transporting a liquid. The apparatus comprises a conditioning container in which the liquid is degassed due to a low pressure. In a supply container, which is arranged downstream of the conditioning container, the degassed liquid is preferably pumped out preferably by means of a plunger pump which is submerged below the surface of the liquid. The plunger pump has a stationary piston and a movable cylinder, wherein the cylinder pumps liquid through an opening of the piston into an outlet conduit. Since the piston and the cylinder are arranged in the liquid, gas bubbles are prevented from entering the liquid to be transported.