Abstract: A method for studying a fluid by forming a stream of the fluid, exciting the stream by causing a laser beam to impinge thereon to produce secondary particles or quanta, and subjecting the resulting secondary particles or quanta to an analysis operation in an analyzer.

Abstract: Apparatus for monitoring a plasma process in which a plasma is formed to occupy a specified region, which apparatus is composed of: a mass spectrometer system including a mass analyzer having an ion inlet and an ion outlet and an ion detector disposed in operative association with the ion outlet; an output device connected to the detector for providing an output signal representative of the mass spectrum of ions observed by the mass spectrometer system; and an ion-optical system having an inlet opening located in the vicinity of the specified region and disposed for extracting ions from the plasma and focussing the ions thus extracted onto the ion inlet of the analyzer, whereby the output signal produced by the output device is representative of the mass spectrum of ions in the plasma.

Abstract: Organic substances, particularly those derived from a chromatograph, are analyzed by subjecting such a substance to laser radiation to produce negative ions of the substance, and by subjecting those negative ions to mass spectrometry, preferably time-of-flight mass spectrometry.

Abstract: A method and apparatus for analyzing a sample comprising the steps of irradiating a selected area of the sample with a first burst of laser energy to vaporize the sample, condensing the vaporized sample on the surface of an intermediate carrier and analyzing the condensed sample material deposited on the intermediate carrier.

Abstract: An apparatus for analyzing a sample by electromagnetic irradiation includes a vacuum chamber, a support for holding the sample in the vacuum chamber, an arrangement for irradiating the sample with an electromagnetic beam, a mass analyzer disposed in the vacuum chamber, an arrangement for extracting particles from the sample and introducing them into the mass analyzer and a layer of conductive material situated in the vicinity of support in the zone of the sample.

Abstract: A sample analyzer includes a microscope for alternatively focusing an electromagnetic radiation on the sample to cause ion emission therefrom and visually observing the sample; a mass spectrometer for the mass analysis of the emitted ions; an illuminating device for lighting the sample for the microscopic visual observation thereof; an ion optical system for directing the emitted ions into the mass spectrometer; and a displaceably supported carrier carrying the ion optical system and at least one part of the illuminating device. The carrier has a first position in which the ion optical system is in an operating position in alignment with the sample and a second position in which the illuminating device is in an operating position in alignment with the sample. There is further provided an actuator for selectively moving the carrier into its positions in a direction generally perpendicular to the axis of the ion optical system.

Abstract: A method for controlling the removal, by means of ion etching, of a thin layer or regions of the layer as determined by masks, from a substrate of a sample which has a chemical composition different than that of the layer to be removed. During the ion etching process, an electrical signal which changes after the removal of the thin layer is derived from the substrate or from its mount, or from an electrode disposed in the vicinity of said substrate and this electrical signal is utilized to control an arrangement which influences the ion bombardment of the surface of the sample.