Patents by Inventor Rekha Rajaram

Rekha Rajaram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
    Publication number: 20150027978
    Abstract: Compositions useful for the selective removal of titanium nitride and/or photoresist etch residue materials relative to metal conducting, e.g., tungsten, and insulating materials from a microelectronic device having same thereon. The removal compositions contain at least one oxidant and one etchant, may contain various corrosion inhibitors to ensure selectivity.
    Type: Application
    Filed: December 27, 2012
    Publication date: January 29, 2015
    Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
    Inventors: Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram, Sheng-Hung Tu
  • AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
    Publication number: 20130296214
    Abstract: Cleaning compositions and processes for cleaning post-plasma etch residue from a microelectronic device having said residue thereon. The composition achieves highly efficacious cleaning of the residue material, including titanium-containing, copper-containing, tungsten-containing, and/or cobalt-containing post-etch residue from the microelectronic device while simultaneously not damaging the interlevel dielectric, metal interconnect material, and/or capping layers also present thereon.
    Type: Application
    Filed: July 15, 2011
    Publication date: November 7, 2013
    Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
    Inventors: Jeffrey A. Barnes, Steven Lippy, Peng Zhang, Rekha Rajaram
  • Facilites Manifold with Proximity Sensor
    Publication number: 20130090765
    Abstract: A high productivity combinatorial system can be configured with sensors to automatically sense an identification tag of an installed reactor assembly, which comprises corresponding sensing elements. Configuration and usage data of the install reactor assembly can be retrieved from the identification tag, allowing the combinatorial system to properly access the reactor regions in the reactor assembly.
    Type: Application
    Filed: October 11, 2011
    Publication date: April 11, 2013
    Applicant: INTERMOLECULAR, INC.
    Inventors: Makonnen Payne, Rekha Rajaram