Patents by Inventor Remco Van Engelen

Remco Van Engelen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method utilizing a multiple dictionary compression method for FPD
    Publication number: 20070045572
    Abstract: A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompress the compressed representation.
    Type: Application
    Filed: August 30, 2005
    Publication date: March 1, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Lambertus Kessels, Patricius Tinnemans, Remco Van Engelen