Patents by Inventor Remo Masut

Remo Masut has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Piezoelectric Alloy Films
    Publication number: 20170263847
    Abstract: A thin film XyAl(1-y)N alloy preferably deposited with an intrinsic tensile stress significantly enhances the piezoelectric properties of AlN. The alloy contains y percent of the compound XN, where X is selected from the group consisting of Yb, Ho, Dy, Lu, Tm, Tb, and Gd. The percentage of XN preferably lies in the range 10-60%, and the stress is preferably in the range 200 MPa-1.5 GPa. The film is useful in MEMS devices.
    Type: Application
    Filed: March 9, 2016
    Publication date: September 14, 2017
    Inventors: Patrick Daoust, Cedrik Coia, Patrick Desjardins, Remo Masut