Patents by Inventor René FUSSENICH

René FUSSENICH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of modelling systems or performing predictive maintenance of lithographic systems
    Patent number: 11543814
    Abstract: Predictive maintenance methods and systems, including a method of applying transfer entropy techniques to find a causal link between parameters; a method of applying quality weighting to context data based on a priori knowledge of the accuracy of the context data; a method of detecting a maintenance action from parameter data by detecting a step and a process capability improvement; a method of managing unattended alerts by considering cost/benefit of attending to one or more alerts over time and assigning alert expiry time and/or ranking the alerts accordingly; a method of displaying components of a complex system in a functional way enabling improvements in system diagnostics; a method of determining the time of an event indicator in time series parameter data; a method of classifying an event associated with a fault condition occurring within a system; and a method of determining whether an event recorded in parameter data is attributable to an external factor.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: January 3, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: David Evert Song Kook Sigtermans, René Fussenich, Adam Marek Kielczewski, Errol Arthur Zalmijn, Marcel Richard André Brunt, Stefan Lucian Voinea
  • METHODS OF MODELLING SYSTEMS OR PERFORMING PREDICTIVE MAINTENANCE OF LITHOGRAPHIC SYSTEMS
    Publication number: 20180267523
    Abstract: Predictive maintenance methods and systems, including a method of applying transfer entropy techniques to find a causal link between parameters; a method of applying quality weighting to context data based on a priori knowledge of the accuracy of the context data; a method of detecting a maintenance action from parameter data by detecting a step and a process capability improvement; a method of managing unattended alerts by considering cost/benefit of attending to one or more alerts over time and assigning alert expiry time and/or ranking the alerts accordingly; a method of displaying components of a complex system in a functional way enabling improvements in system diagnostics; a method of determining the time of an event indicator in time series parameter data; a method of classifying an event associated with a fault condition occurring within a system; and a method of determining whether an event recorded in parameter data is attributable to an external factor.
    Type: Application
    Filed: September 13, 2016
    Publication date: September 20, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: David Evert Song Kook SIGTERMANS, René FUSSENICH, Adam Marek KIELCZEWSKI, Errol Arthur ZALMIJN, Marcel Richard André BRUNT, Stefan Lucian VOINEA