Abstract: In the present invention, a high-voltage side electrode constituent part includes a dielectric electrode and metal electrodes formed on the upper surface of the dielectric electrode. The dielectric electrode has a structure in which a film thickness is continuously changed along an X direction. That is, the film thickness of the right end of the dielectric electrode is set to a thickness dA1; and the film thickness of the left end is set to a thickness dB1 (>dA1), and is continuously increased from the right end to the left end along the X direction.

Abstract: In an active gas generation apparatus of the present invention, an auxiliary conductive film provided on a first electrode dielectric film is provided to overlap part of an active gas flow path in plan view, and the auxiliary conductive film is set to the ground potential. An active gas auxiliary member provided on a second electrode dielectric film is provided to fill part of the active gas flow path between a discharge space and a gas ejection hole in a dielectric space between the first and second electrode dielectric films in order to limit to an active gas flow gap.

Abstract: An optical branching/coupling device includes a single first port that has an optical fiber; a plurality of second ports each having an optical fiber and arranged at the periphery of the optical axis of the first port, in locations that are removed from the first port in an optical axis direction; a core layer that transmits light between the first port and the second ports; and a cladding layer that covers the periphery of the core layer, wherein the core includes a plurality of optical waveguides, one end side of the optical waveguides being connected to each core of the plurality of second ports, and another end side of the optical waveguides joining together and being connected to a core of the first port, and the optical waveguides are a cured product of a photocuring resin.

Abstract: Provided is an optical branching/coupling device in which optical transmission quality is improved by preventing a reduction in optical transmission quality, the reduction being due, for example, to an optical waveguide core affecting a light of another optical waveguide core in the vicinity of a joining section of the two optical waveguide cores. This optical branching/coupling device includes: a first optical waveguide that is provided extending from one end side to other end side; a second optical waveguide that is provided extending on a separate route from the one end side to the other end side, the other end side of the second optical waveguide being joined to the other end side of the first optical waveguide; and a cladding layer that covers the periphery of the first optical waveguide and the second optical waveguide, wherein the first and second optical waveguides comprise a cured product of a photocuring resin.

Abstract: Provided is an optical branching/coupling device in which optical transmission quality is improved by preventing a reduction in optical transmission quality, the reduction being due, for example, to an optical waveguide core affecting a light of another optical waveguide core in the vicinity of a joining section of the two optical waveguide cores. This optical branching/coupling device includes: a first optical waveguide that is provided extending from one end side to other end side; a second optical waveguide that is provided extending on a separate route from the one end side to the other end side, the other end side of the second optical waveguide being joined to the other end side of the first optical waveguide; and a cladding layer that covers the periphery of the first optical waveguide and the second optical waveguide, wherein the first and second optical waveguides comprise a cured product of a photocuring resin.