Abstract: A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on the one or more samples; determine rankings for a set of target parameters; generate a recipe for performing the one or more measurements on the one or more samples based on the DoE data and the rankings of the set of target parameters; determine run parameters based on the recipe; perform the one or more measurements on the one or more samples, via the sample analysis sub-system, according to the recipe; and adjust the run parameters based on output data associated with performing the one or more measurements on the one or more samples.

Abstract: A handheld spectrometer apparatus may comprise an accessory coupled to a spectrometer, where the accessory is configured to receive a liquid sample pipette to facilitate measurement, using the spectrometer, of a liquid sample within the pipette. A handheld spectrometer apparatus to measure a body lumen of a subject can include an illumination unit, a spectrometer unit, a housing containing the illumination unit and the spectrometer unit and an accessory comprising a plurality of optical fibers. The optical fibers can be configured to guide light from the illumination unit to the body lumen and back from the body lumen to the spectrometer unit.

Abstract: A handheld spectrometer apparatus may comprise an accessory coupled to a spectrometer, where the accessory is configured to receive a liquid sample pipette to facilitate measurement, using the spectrometer, of a liquid sample within the pipette. A handheld spectrometer apparatus to measure a body lumen of a subject can include an illumination unit, a spectrometer unit, a housing containing the illumination unit and the spectrometer unit and an accessory comprising a plurality of optical fibers. The optical fibers can be configured to guide light from the illumination unit to the body lumen and back from the body lumen to the spectrometer unit.

Abstract: A method for measurement of misregistration in the manufacture of semiconductor device wafers, the method including measuring misregistration between layers of a semiconductor device wafer at a first instance and providing a first misregistration indication, measuring misregistration between layers of a semiconductor device wafer at a second instance and providing a second misregistration indication, providing a misregistration measurement difference output in response to a difference between the first misregistration indication and the second misregistration indication, providing a baseline difference output and ameliorating the difference between the misregistration measurement difference output and the baseline difference output.

Abstract: A method for measurement of misregistration in the manufacture of semiconductor device wafers, the method including measuring misregistration between layers of a semiconductor device wafer at a first instance and providing a first misregistration indication, measuring misregistration between layers of a semiconductor device wafer at a second instance and providing a second misregistration indication, providing a misregistration measurement difference output in response to a difference between the first misregistration indication and the second misregistration indication, providing a baseline difference output and ameliorating the difference between the misregistration measurement difference output and the baseline difference output.

Abstract: A method for process control in the manufacture of semiconductor devices including performing metrology on at least one semiconductor wafer included in a given lot of semiconductor wafers, following processing of the at least one semiconductor wafer by a first processing step, generating, based on the metrology, at least one correctable to a second processing step subsequent to the processing step and adjusting, based on the correctable, performance of the second processing step on at least some semiconductor waters of the given lot of semiconductor wafers.

Abstract: A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on the one or more samples; determine rankings for a set of target parameters; generate a recipe for performing the one or more measurements on the one or more samples based on the DoE data and the rankings of the set of target parameters; determine run parameters based on the recipe; perform the one or more measurements on the one or more samples, via the sample analysis sub-system, according to the recipe; and adjust the run parameters based on output data associated with performing the one or more measurements on the one or more samples.

Abstract: A method for measurement of misregistration in the manufacture of semiconductor device wafers, the method including measuring misregistration between layers of a semiconductor device wafer at a first instance and providing a first misregistration indication, measuring misregistration between layers of a semiconductor device wafer at a second instance and providing a second misregistration indication, providing a misregistration measurement difference output in response to a difference between the first misregistration indication and the second misregistration indication, providing a baseline difference output and ameliorating the difference between the misregistration measurement difference output and the baseline difference output.

Abstract: A handheld spectrometer apparatus may comprise an accessory coupled to a spectrometer, where the accessory is configured to receive a liquid sample pipette to facilitate measurement, using the spectrometer, of a liquid sample within the pipette. A handheld spectrometer apparatus to measure a body lumen of a subject can include an illumination unit, a spectrometer unit, a housing containing the illumination unit and the spectrometer unit and an accessory comprising a plurality of optical fibers. The optical fibers can be configured to guide light from the illumination unit to the body lumen and back from the body lumen to the spectrometer unit.