Abstract: A method for manufacturing at least one membrane system for a micromechanical sensor for the calorimetric detection of gases. A wafer-shaped substrate is provided. At least one reference volume is introduced from a front side into the wafer-shaped substrate with the aid of a surface or volume micromechanical process while forming a reference membrane covering the reference volume at least in some areas. At least one measuring volume, which is adjacent to the at least one reference volume, is introduced into the substrate from a back side or the front side of the wafer-shaped substrate while forming a measuring membrane. A wafer-shaped cap substrate is applied onto the front side of the wafer-shaped substrate. A membrane system and a component are described.

Abstract: A sensor for detecting at least one property of a fluid medium in at least one measuring chamber. The sensor includes a sensor element having at least one heatable diaphragm and an electrical measuring bridge. The diaphragm is connected to the electrical measuring bridge. The sensor is furthermore designed to detect an electrical resistance of the measuring bridge. The sensor is designed to detect a pressure of the fluid medium based on the detected electrical resistance of the electrical measuring bridge.

Abstract: A gas sensor for detecting a physical and/or chemical value of an analysis gas, a corresponding manufacturing method, and operating method. The gas sensor is based on the principle of a thermal conductivity measurement with the aid of a sensor structure including a double meander structure made up of two resistor lines, as part of a Wheatstone bridge circuit, on a diaphragm of a substrate. The two resistor lines are energized in opposite directions as a function of the detected temperature. The physical and/or chemical value(s) of the analysis gas are/is subsequently determined as a function of the voltages detected at the double meander structure.

Abstract: A sensor for measuring a concentration of an analysis fluid based on a thermal conductivity principle. The sensor includes at least one analysis heating element, situated on a measuring diaphragm, for heating the analysis fluid, and a reference heating element, situated on a reference diaphragm, for heating at least one reference gas. The measuring diaphragm and the reference diaphragm are adjacently situated between a sensor substrate and a cap substrate. The measuring diaphragm is situated in a measuring volume and the reference diaphragm is situated in a reference volume. The measuring diaphragm and the reference diaphragm each include at least one coating. The measuring diaphragm is opened by at least one clearance. A method for manufacturing a sensor is also described.

Abstract: A gas sensor is described for measuring a concentration of an analysis gas based on a thermal conductivity principle, including at least one analysis heating element situated on a first diaphragm for heating the analysis gas, a reference heating element situated on a second diaphragm for heating a reference gas, at least one evaluation electronics unit for measuring a resistance change of the analysis heating element caused by the analysis gas in relation to an electrical resistance of the reference heating element, the first diaphragm and the second diaphragm being situated adjacent to one another in a sensor substrate, due to a base substrate situated on one side on the sensor substrate, a measuring volume is formable between the first diaphragm and the base substrate and a reference volume is formable between the second diaphragm and the base substrate.

Abstract: A method for manufacturing at least one membrane system for a micromechanical sensor for the calorimetric detection of gases. A wafer-shaped substrate is provided. At least one reference volume is introduced from a front side into the wafer-shaped substrate with the aid of a surface or volume micromechanical process while forming a reference membrane covering the reference volume at least in some areas. At least one measuring volume, which is adjacent to the at least one reference volume, is introduced into the substrate from a back side or the front side of the wafer-shaped substrate while forming a measuring membrane. A wafer-shaped cap substrate is applied onto the front side of the wafer-shaped substrate. A membrane system and a component are described.

Abstract: A gas sensor is described for measuring a concentration of an analysis gas based on a thermal conductivity principle, including at least one analysis heating element situated on a first diaphragm for heating the analysis gas, a reference heating element situated on a second diaphragm for heating a reference gas, at least one evaluation electronics unit for measuring a resistance change of the analysis heating element caused by the analysis gas in relation to an electrical resistance of the reference heating element, the first diaphragm and the second diaphragm being situated adjacent to one another in a sensor substrate, due to a base substrate situated on one side on the sensor substrate, a measuring volume is formable between the first diaphragm and the base substrate and a reference volume is formable between the second diaphragm and the base substrate.