Abstract: A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.

Abstract: A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.

Abstract: A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.

Abstract: A MEMS scanner system and method, the system for deflecting an incident laser beam including a MEMS mirror 26 operable to receive the incident laser beam and to generate a reflected laser beam, and an opaque plate 28 having an aperture 30, the opaque plate 28 being opposite the MEMS mirror 26. The aperture 30 is sized to permit the incident laser beam and the reflected laser beam to pass through the aperture 30.