Patents by Inventor Renaud Fix

Renaud Fix has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for chemical vapor deposition of transition metal nitrides
    Patent number: 5139825
    Abstract: A process for depositing a thin film of a transition metal nitride, e.g., titanium nitride, on a substrate is provided. The vapors of a transition metal organometallic coompound or a transition metal amido compound are mixed with ammonia gas and allowed to react near a substrate heated to a temperature in the range of 100.degree. C. to 400.degree. C., resulting in deposition of a film on the substrate.
    Type: Grant
    Filed: November 30, 1989
    Date of Patent: August 18, 1992
    Assignee: President and Fellows of Harvard College
    Inventors: Roy G. Gordon, Renaud Fix, David Hoffman