Abstract: Embodiments of the systems and methods discussed herein autofocus an imaging apparatus by pre-processing image data received via channels of the imaging system that include laser beams and sensors configured to receive image data when laser beams are applied across a substrate in a pixel-wise application across a substrate. The substrate can include both a photoresist and metallic material, and the images as-received by the sensors include noise from the metallic material. During pre-processing of the image data, a percentage of noise to remove from the image data is determined, and the image data is filtered. A centroid of the substrate is calculated for each channel and a focus deviation for the exposure is determined. The centroids can be combined using one or more filtering mechanisms, and the imaging system can be autofocused in an exposure position by moving the stage and/or the exposure source in one or more directions.

Abstract: Embodiments of the systems and methods discussed herein autofocus an imaging apparatus by pre-processing image data received via channels of the imaging system that include laser beams and sensors configured to receive image data when laser beams are applied across a substrate in a pixel-wise application across a substrate. The substrate can comprise both a photoresist and metallic material, and the images as-received by the sensors include noise from the metallic material. During pre-processing of the image data, a percentage of noise to remove from the image data is determined, and the image data is filtered. A centroid of the substrate is calculated for each channel and a focus deviation for the exposure is determined. The centroids can be combined using one or more filtering mechanisms, and the imaging system can be autofocused in an exposure position by moving the stage and/or the exposure source in one or more directions.

Abstract: In one embodiment of the invention, a method of simulating a circuit is disclosed including partitioning a circuit into a plurality of blocks, each of the plurality of blocks being radio-frequency blocks or non-radio frequency blocks; performing a first simulation of a first simulation type with the radio-frequency blocks to generate output waveforms of the radio-frequency blocks; performing a second simulation of a second simulation type with the non-radio-frequency blocks to generate output waveforms of the non-radio-frequency blocks where the second simulation type differs from the first simulation type; and synchronizing the first simulation and the second simulation together at one or more time steps to generate output waveforms for the circuit.