Patents by Inventor Rene Marinus Gerardus Johan Queens

Rene Marinus Gerardus Johan Queens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, device manufacturing method, and device manufactured thereby
    Publication number: 20030218141
    Abstract: A method of calibrating level sensors of at least two lithographic projection apparatus to correct machine to machine level sensor process dependency includes measuring a first set of leveling data using a first lithographic projection apparatus for a reference substrate, measuring a second set of leveling data using the first apparatus for a substrate processed according to a selected process, measuring a third set of leveling data using the second apparatus for the reference substrate, measuring a fourth set of leveling data using the second apparatus for the processed substrate, and using the first, second, third and fourth sets of leveling data to calculate the set of level sensor parameters corresponding to machine to machine level sensor differences for the selected process.
    Type: Application
    Filed: April 22, 2003
    Publication date: November 27, 2003
    Applicant: ASML NETHERLANDS, B.V.
    Inventors: Rene Marinus Gerardus Johan Queens, Paulus Antonius Andreas Teunissen