Patents by Inventor Rene Nitsche

Rene Nitsche has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Retaining ring having reduced wear and contamination rate for a polishing head of a CMP tool
    Publication number: 20040123951
    Abstract: A retaining member for a polishing head in a CMP apparatus comprises a bottom surface with silicon carbide. Due to the superior characteristics of silicon carbide, a low wear rate of the retaining member is secured, wherein, additionally, accumulation of electrostatic charges is substantially avoided due to the conductivity of silicon carbide. Consequently, cost of ownership is reduced, while at the same time process stability over a large number of substrates is increased.
    Type: Application
    Filed: June 18, 2003
    Publication date: July 1, 2004
    Inventors: Jens Kramer, Gerd Marxsen, Rene Nitsche