Patents by Inventor Rene P. Cachon

Rene P. Cachon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical alignment system in projection printing
    Patent number: 4198159
    Abstract: Apparatus for placing a resist coated semiconductor wafer surface in the image plane of an optical system by means of three drivers (e.g. actuated flexure joints), with non-contact sensing (e.g. air gauges) at each driver providing individual feedback thereto to move the wafer into the image plane.
    Type: Grant
    Filed: December 29, 1978
    Date of Patent: April 15, 1980
    Assignee: International Business Machines Corporation
    Inventor: Rene P. Cachon