Patents by Inventor Rene T. Correa

Rene T. Correa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and methods for ambient air abatement of electronic manufacturing effluent
    Patent number: 8003067
    Abstract: An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
    Type: Grant
    Filed: March 21, 2008
    Date of Patent: August 23, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Mark W. Curry, Barry Page, Shaun W. Crawford, Robbert Vermeulen, William D. Pyzel, Youssef Loldj, Rene T. Correa, Daniel S. Brown, Allen Fox
  • Substrate support lift mechanism
    Patent number: 7871470
    Abstract: An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: January 18, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Eric W. Schieve, Keith K. Koai, David T. Or, Rene T. Correa
  • APPARATUS AND METHODS FOR AMBIENT AIR ABATEMENT OF ELECTRONIC DEVICE MANUFACTURING EFFLUENT
    Publication number: 20090078656
    Abstract: An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system comprising an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
    Type: Application
    Filed: March 21, 2008
    Publication date: March 26, 2009
    Inventors: Mark W. Curry, Barry Page, Shaun W. Crawford, Robbert Vermeulen, William D. Pyzel, Youssef Loldj, Rene T. Correa, Daniel S. Brown, Allen Fox
  • Substrate support lift mechanism
    Publication number: 20040177813
    Abstract: An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a gimbal mechanism having radially aligned clamping that substantially prevents movement from a pre-defined plane of a substrate support coupled to the gimbal mechanism during clamping. In another embodiment, an apparatus for positioning a substrate support includes substrate support disposed in a processing chamber. A stem, coupled to the substrate support, extends through the processing chamber and is coupled to a gimbal assembly. The gimbal assembly has a radial clamping mechanism is adapted to adjust a planar orientation of the substrate support about a plurality of axes without exerting rotational moments on the substrate support during clamping. A bearing assembly, having a first carriage block and a second carriage block, is coupled to the gimbal assembly.
    Type: Application
    Filed: March 12, 2003
    Publication date: September 16, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Eric W. Schieve, Keith K. Koai, David T. Or, Rene T. Correa