Patents by Inventor Renlong LI

Renlong LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INITIAL TREATMENT METHOD FOR TARGET MATERIAL FOR PHYSICAL VAPOR DEPOSITION PROCESS, AND CONTROLLER
    Publication number: 20220074043
    Abstract: A method for initial treatment of a target material based on a physical vapor deposition (PVD) process and a controller includes: enhancing a turn-on current on a new target material multiple times from zero to a preset current. The method for initial treatment of a target material provided by the disclosure can avoid the occurrence of electric arc causing downtime for maintenance when the new target material participates in a cavity cleaning process.
    Type: Application
    Filed: August 17, 2021
    Publication date: March 10, 2022
    Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Renlong LI, NUNG-CHAN WANG