Patents by Inventor Rex Eiserer

Rex Eiserer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical metrology target design for simultaneous measurement of multiple periodic structures
    Publication number: 20050173634
    Abstract: An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.
    Type: Application
    Filed: March 2, 2005
    Publication date: August 11, 2005
    Inventors: Alan Wong, Gary Cao, Rex Eiserer
  • Optical metrology target design for simultaneous measurement of multiple periodic structures
    Publication number: 20030160163
    Abstract: An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.
    Type: Application
    Filed: February 25, 2002
    Publication date: August 28, 2003
    Inventors: Alan Wong, Gary X. Cao, Rex Eiserer